PZT PLD Target Pb[Zr-Ti]O3

General information about the properties of PZT thin films

PbZrxTi1-xO3 (PZT) is a well-known ferroelectric material that has been widely used for various applications due to its unique piezoelectric and ferroelectric properties. PZT thin films can be used to develop active and passive devices, such as sensors and actuators. These devices are based on the ability of PZT thin films to generate an electric charge in response to an applied mechanical stress, or to change their shape in response to an electric field.

The use of PZT thin films in research and applications

PZT thin films have been the subject of intense research and development, and have been applied in a wide range of fields, including electronics, optoelectronics, biomedicine, and energy harvesting. For example, in electronics, PZT thin films have been used to develop high-frequency transducers and high-density memory devices. In optoelectronics, PZT thin films have been used to develop electro-optic modulators and wavelength converters. In biomedicine, PZT thin films have been used to develop implantable medical devices, such as cochlear implants and drug delivery systems. In energy harvesting, PZT thin films have been used to develop piezoelectric energy harvesters, which convert mechanical energy into electrical energy.

Piezoelectric properties of PZT thin films

The piezoelectric properties of PZT thin films are primarily determined by the Zr/Ti ratio in the film. Generally, the piezoelectric response of PZT thin films increases with increasing Zr content. However, the ferroelectric properties of PZT thin films, such as the Curie temperature and dielectric constant, are sensitive to the Zr/Ti ratio. As a result, the Zr/Ti ratio must be carefully optimized in order to achieve the desired properties for a particular application. In comparison to other piezoelectric materials, such as AlN and ZnO, PZT thin films have a high piezoelectric coefficient, making them an attractive option for various applications. However, the high lead content of PZT thin films makes them less suitable for applications where the environmental impact is a concern.

The Most Common Composition of PZT

The most researched composition of PZT thin films is PbZr0.52Ti0.48O3 (PZT-52/48), which has a morphotropic phase boundary. This means that the properties of PZT-52/48 can be easily tuned by changing the composition slightly, making it a popular choice for researchers. PZT-52/48 has the optimal combination of properties, including high ferroelectric polarization, good piezoelectric response, and high Curie temperature, making it ideal for a wide range of applications.

Other common compositions of PZT

In addition to PZT-52/48, other compositions of PZT thin films, such as PbZr0.7Ti0.3O3 (PZT-70/30) and PbZr0.8Ti0.2O3 (PZT-80/20), have also been investigated for their properties and applications. These compositions are of interest because they can offer unique properties that are not available in the more commonly used PZT-52/48. For example, PZT-70/30 is known for its high ferroelectric polarization and high piezoelectric response, making it suitable for high-frequency transducers. PZT-80/20, on the other hand, is known for its high Curie temperature and high dielectric constant, making it suitable for applications in high-temperature environments.

Temperature and background oxygen pressure for depositing PZT by pulsed laser deposition

The temperature and background oxygen pressure used during the deposition of PZT thin films by pulsed laser deposition (PLD) are critical factors that can affect the quality of the films. The deposition temperature is typically in the range of 400 to 700°C, depending on the desired properties of the film. The background oxygen pressure is usually in the range of 10^-6 to 10^-4 mbar, and is used to control the stoichiometry of the films.

Making PZT powder and sintering into PLD targets

PZT powder is made by solid state synthesis, which involves mixing the appropriate amounts of PbO, ZrO2, and TiO2 powders, and heating them to a high temperature in a controlled atmosphere. After the synthesis, the PZT powder is sintered into a dense target by heating it at high temperatures in an oxygen atmosphere. This process removes any residual porosity in the target and enhances its mechanical stability, making it suitable for use in PLD.

Crystal structure of PZT

The crystal structure of PZT is perovskite, which is a type of cubic crystal structure that is characterized by a specific arrangement of atoms. The perovskite structure is responsible for the unique properties of PZT, such as its high ferroelectric polarization and piezoelectric response.

Excess PbO in PLD targets

Excess PbO is often added to PLD targets to compensate for any loss of Pb that may occur during the ablation process. Typically 10mol % is added but we can customize to your requirements. This ensures that the stoichiometry of the films is maintained, and that the desired properties of the films are achieved.

Substrates and substrate orientations for epitaxial growth of PZT thin films

The choice of substrate and substrate orientation is an important factor in the epitaxial growth of PZT thin films. Common substrates include SrTiO3, LSAT and LaAlO3. The (100) orientation is typically used to obtain films with high ferroelectric polarization, while the (001) orientation is used to obtain films with high piezoelectric response.PZT Thin Films Information

5 other thin film materials related to PZT

- BaTiO3 (Barium Titanate)
- BiFeO3 (Bismuth Ferrite)
- AlN (Aluminum Nitride)
- LiNbO3 (Lithium Niobate)
- LiTaO3 (Lithium Tantalate)

Papers discussing PLD of PZT thin films:

"Structural and electrical properties of pulsed laser deposited Pb(Zr0.52Ti0.48)O3 thin films"
- "Ferroelectric and piezoelectric behavior of PbZr0.53Ti0.47O3 thin films deposited by pulsed laser deposition"
- "Improvement of ferroelectric and piezoelectric properties of PbZr0.52Ti0.48O3 thin films by optimizing pulsed laser deposition conditions"
- "Development of Pb(Zr0.52Ti0.48)O3 thin films by pulsed laser deposition and characterization of its electrical properties"
- "Fabrication and characterization of PbZr0.2Ti0.8O3 thin films deposited by pulsed laser deposition on Si substrates"

Are there any health concerns related to PZT:

This material contains lead, which is poisonous. It is important to handle PZT powders with care and to avoid inhaling any particles generated during its processing or handling.

How should a PZT target be stored:

PZT targets should be stored in a clean, dry environment at room temperature to avoid moisture and other contaminants that could degrade its performance. The target should also be handled with care to avoid physical damage that could cause breakage or cracks.

5 interesting facts about PZT:

- PZT is one of the most widely used piezoelectric materials.
- PZT can generate an electric charge in response to mechanical stress and can also convert electrical energy into mechanical motion.
- The Zr/Ti ratio in PZT can greatly influence its piezoelectric properties.
- PZT is used in a wide range of applications, including transducers, actuators, sensors, and energy harvesters.
- PZT has a unique perovskite crystal structure which is responsible for its piezoelectric properties.