Target Materials
Titanium Dioxide (TiO2) PLD Target
Titanium Dioxide (TiO2) PLD Target
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Material | Titanium Dioxide, Titania |
Formula | TiO2, Rutile |
Purity | 99.99% |
Typical Substrates | SrTiO3, LaAlO3, Si, MgO, Al2O3, Glass, Quartz |
Related Materials | Al2O3, ZrO2, Ta2O5, BaTiO3, HfO2 ZnO |
Introduction to TiO2 PLD Thin Films
Titanium dioxide (TiO2) is a versatile ceramic material used in various applications such as photocatalysis, sensors, photovoltaics, and electrochromic devices. TiO2 is an important material due to its unique electronic, optical and structural properties. In this section, we will discuss the properties of TiO2 and its use in thin film form.
Optical and Electronic Properties of TiO2
TiO2 has a wide bandgap of 3.2 eV, making it a good candidate for optoelectronic applications. The refractive index of TiO2 is around 2.4 in the visible range. TiO2 also exhibits a high dielectric constant and low loss tangent, making it a good material for microelectronics.
Comparison of TiO2 with Similar Materials
TiO2 has better photocatalytic activity and chemical stability compared to similar materials such as ZnO and SnO2. However, its electron conductivity is lower compared to these materials.
Crystal Structure of TiO2
TiO2 has a tetragonal crystal structure with the rutile phase being the most common and lass compact anatase structure being less common but also of scietific interest in part because it has a larger band gap than rutile TiO2.
Typical Substrates for Epitaxial Growth
Anatase TiO2 hasan be epitaxially grown on substrates that have a similar lattice constant, such as TiO2 terminated-SrTiO3, LaAlO3, and Si(001) substrates.
Rutile TiO2 has a more compact tetragonal structure and can be epitaxially grown on substrates such as SrTiO3, MgO(001), and Al2O3(001).
Other Similar Thin Film Materials
- ZnO
- SnO2
- Al2O3
- SiO2
- MgO
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