Zinc Oxide ZnO Sputtering Target
Zinc Oxide ZnO Sputtering Target
Material | Zinc Oxide |
Formula | ZnO |
Purity | 99.99% |
Typical Substrates | Al2O3, Glass, Quartz, Sapphire, Polymers, Silicon and Silicon Dioxide |
Related Materials | ITO, TiO2, Al2O3, In2O3 |
Crystal Structure of ZnO
ZnO has a wurtzite crystal structure and is a direct bandgap material with a bandgap energy of 3.37 eV.
Optoelectric Properties of ZnO
The optoelectric properties of ZnO make it an ideal choice for use in a variety of optoelectronic devices. These properties include high transparency in the visible spectrum, high electron mobility, and a wide bandgap. These properties make ZnO suitable for use in devices such as light emitting diodes, solar cells, and sensors.
Typical Substrates
For epitaxial growth of ZnO, substrates with a good lattice match are typically used to ensure high quality films. Some examples of substrates with a good lattice match include sapphire (Al2O3), ZnO (homoepitaxy), and magnesium oxide (MgO). Other non-matching substrates such as silicon (Si) and quartz (SiO2) can also be used for ZnO epitaxial growth, but typically result in lower quality films.
Crystallinity in ZnO
ZnO natually wants to form 0001 oriented crystallites even at low temperatures or on non matching substrates. This appears are nicely formed hexagonal grains and it can be trickly to grow non-(0001) textured films.
Five other thin film materials similar to ZnO:
- Al2O3 (Aluminum Oxide) - a wide bandgap material with a high thermal stability, making it suitable for high temperature applications
- GaN (Gallium Nitride) - a wide bandgap material with high electron mobility and a high breakdown field, making it suitable for high-power and high-frequency electronic devices
- In2O3 (Indium Oxide) - a transparent conductive oxide with a high electron mobility, making it suitable for use in thin film transistors and touch screens
- TiO2 (Titanium Dioxide) - a wide bandgap material with a high refractive index and high chemical stability, making it suitable for use in optical coatings and protective coatings
- SnO2 (Tin Dioxide) - a transparent conductive oxide with a high electron mobility, making it suitable for use in thin film transistors and gas sensors.
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